• Large clear aperture

• Travel range from 100 mm
   x 100 mm to 400 mm x 400 mm

• High performance linear motion
  guides

• 15 arc sec orthogonality

• Noncontact linear encoder for high
  accuracy

• Direct-drive linear motor for
   ultra-precis motion

• High-accuracy noncontact
   linear encoder

• Outstanding performance in
   a small footprint